High-Precision XY Tables for Semiconductor Wafer Quality Control
Source:Industrial Automation /
Time:2026-08-17
Linear motors are used in high-precision XY tables with air bearings for wafer quality control in semiconductor manufacturing, requiring cleanroom-compatible linear motor cables .
Application Requirements:
High-precision XY tables with air bearings
Accuracy: Half a micron
Cleanroom environment
Surface inspection of wafers
Cable Requirements:
Low-particle generation for cleanroom compatibility
High flexibility for continuous motion
Reliable signal transmission for position feedback
The demanding accuracy requirements of semiconductor wafer inspection place high demands on both the linear motor system and its associated cables and energy supply systems .
